| Code# | 525-020DP |
|---|---|
| Granite Stage | (310*220) mm |
| Glass Stage | (179.5*129.5) mm |
| X/Y Axis Travel | (150*100) mm |
| Linear Scales | Resolution: 0.5um |
| Kod# | 525-020P |
|---|---|
| Granitowy etap | (310*220) mm |
| Szklana scena | (179,5*129,5) mm |
| Przejazd w osi X/Y | (150*100) mm |
| Skale liniowe X/Y | Rozdzielczość: 0,5um |
| Kod# | 512-350 |
|---|---|
| Rozmiar etapu roboczego | 355x126mm |
| Etap roboczy Podróż | 200x100 mm |
| Skupienie | 90 mm |
| Dokładność | ≤3+L/200(um) |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |
| Code# | 542-310 |
|---|---|
| Working Stage Travel | 355x125mm |
| X/Y-axis Travel | 200x120mm |
| Z axis | 110mm |
| Measurement Accuracy | ≤3+L/200um |